半导体晶圆制造中组合设备运行和控制综述

摘要/Abstract

摘要： 作为半导体制造中单晶圆加工技术的可重构集成设备，组合设备在半导体产业得到越来越广泛的应用。使用组合设备使得半导体制造产出更高、生产周期更短、空间利用率更高以及生产成本更低。由于组合设备的运行受限于诸多约束条件，有效运行一台组合设备相当困难。目前已有大量的有关组合设备建模、性能分析及调度等相关研究工作。本文回顾了这些研究工作的进展及其使用的研究方法,探讨了现有的方法的优缺点。基于这些分析，指出了进一步的研究方向。

关键词: 半导体制造, 组合设备, 生产调度, 系统建模和分析

Abstract: As integrated and configurable equipment with single wafer processing, cluster tools are increasingly adopted by semiconductor manufacturers. It results in higher yield, shorter cycle time, better utilization of space, and lower fabrication cost. However, with various constraints, it is difficult to effectively operate a cluster tool. Thus, great research attention has been paid for modeling, analyzing, and scheduling of cluster tools. In this paper, research advancement and techniques in modeling, analyzing, and scheduling of cluster tools are reviewed. It analyzes the advantages and disadvantages of the existing techniques. Based on the analysis, future research directions are given.

Key words: semiconductor manufacturing, cluster tools, production scheduling, system modeling and analysis

闵雁, 伍乃骐. 半导体晶圆制造中组合设备运行和控制综述[J]. 工业工程, 2012, 15(2): 1-15.

Min Yan, Wu Naiqi. Review of Operations and Control of Cluster Tools in Semiconductor Wafer Fabrication[J]. Industrial Engineering Journal , 2012, 15(2): 1-15.

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