基于门控循环单元强化学习的晶圆光刻区实时调度方法研究
吴立辉, 石津铭, 金克山, 张洁
Real-time Scheduling of Wafer Photolithography Area Based on Reinforcement Learning with Gated Recurrent Unit
WU Lihui, SHI Jinming, JIN Keshan, ZHANG Jie
工业工程
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2024, (3): 12
-21,30
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DOI: 10.3969/j.issn.1007-7375.240100
