Industrial Engineering Journal
Real-time Scheduling of Wafer Photolithography Area Based on Reinforcement Learning with Gated Recurrent Unit
WU Lihui, SHI Jinming, JIN Keshan, ZHANG Jie
Industrial Engineering Journal . 2024, (3): 12 -21,30 .  DOI: 10.3969/j.issn.1007-7375.240100