Industrial Engineering Journal
A Study of the Standard Deviation Change in the Wafer Thinning Process Based on the Multiscale Estimation Theory
LIU Yang, GAO Wenke, ZHANG Zhisheng, SHI Jinfei
Industrial Engineering Journal . 2018, (3): 75 -81 .  DOI: 10.3969/j.issn.1007-7375.2018.03.009