基于分配结算函数的晶圆投放仿真优化方法

doi:10.3969/j.issn.1007-7375.2023.03.015

工业工程 ›› 2023, Vol. 26 ›› Issue (3): 134-142.doi: 10.3969/j.issn.1007-7375.2023.03.015

基于分配结算函数的晶圆投放仿真优化方法

于一豪, 张正敏, 管在林

华中科技大学机械科学与工程学院，湖北武汉 430074

收稿日期:2022-04-09 发布日期:2023-07-08
通讯作者: 管在林(1966-),男,江苏省人,教授,博士,主要研究方向为高级计划排程与生产运作优化、制造系统建模仿真与物流分析、数字化工厂。E-mail:zlguan@hust.edu.cn E-mail:zlguan@hust.edu.cn
作者简介:于一豪(1997-),女,河南省人,硕士研究生,主要研究方向为调度优化、智能优化算法、仿真优化等
基金资助:
国家重点研发计划资助项目(2018YFB1702700)

A Wafer Release Planning Simulation Optimization Method Based on Allocated Clearing Functions

YU Yihao, ZHANG Zhengmin, GUAN Zailin

School of Mechanical Science & Engineering, Huazhong University of Science and Technology, Wuhan 430074, China

Received:2022-04-09 Published:2023-07-08

摘要/Abstract

摘要： 为了提高传统仿真优化方法的求解精度和收敛效果，提出一种基于分段线性分配结算函数 (allocated clearing functions, ACF) 的两阶段仿真优化方法以求解晶圆投放计划问题，用以决策每个计划周期不同类型产品的最优投放速率。该方法首先构建分段线性拟合模型拟合分配结算函数，以最小化生产成本为目标，建立基于分配结算函数的数学投放模型并求解，快速得到近似全局最优解作为较高质量初始解；然后建立离散事件仿真模型，并结合模拟退火算法以形成仿真优化框架，通过对初始解进行邻域搜索获得符合生产实际的满意解。实验结果表明，基于分段线性分配结算函数的两阶段仿真优化方法相比于对比方法和企业现行方法节省了超过27%的生产成本。

关键词: 分配结算函数, 两阶段仿真优化, 晶圆制造, 生产投放计划

Abstract: In order to improve the solution accuracy and convergence effect of traditional simulation optimization methods, a two-stage simulation optimization method based on segmented linearly allocated clearing functions (ACF) is proposed to solve the wafer release planning, which is used to decide the optimal release rates for different types of products in each planning cycle. The method first constructs a segmented linear fitting model to fit ACF. A mathematical release model based on ACF is established and solved with the objective of minimizing production costs to quickly obtain an approximate global optimal solution as a high quality initial solution. Then, a discrete-event simulation model is developed combining with simulated annealing algorithm to form a simulation optimization framework. A satisfactory solution that meets the production reality is obtained by performing a neighbourhood search based on the initial solution. Experimental results show that the two-stage simulation optimization method based on segmented linearly ACF saves more than 27% of production cost compared to the comparison methods and the current enterprise methods.

Key words: allocated clearing functions, two-stage simulation optimization, wafer fabs, production release planning

中图分类号:

TP391.9

于一豪, 张正敏, 管在林. 基于分配结算函数的晶圆投放仿真优化方法[J]. 工业工程, 2023, 26(3): 134-142.

YU Yihao, ZHANG Zhengmin, GUAN Zailin. A Wafer Release Planning Simulation Optimization Method Based on Allocated Clearing Functions[J]. Industrial Engineering Journal, 2023, 26(3): 134-142.

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基于分配结算函数的晶圆投放仿真优化方法

A Wafer Release Planning Simulation Optimization Method Based on Allocated Clearing Functions

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