基于eM-Plant求解具有晶圆重入过程的单臂组合设备最优调度的仿真方法

摘要/Abstract

摘要： 在半导体组合设备的晶圆加工过程中，常常要求晶圆重入，原子层沉积加工(ALD)就是典型的晶圆加工过程。对这样的系统实施调度是一个挑战性的问题。研究单臂组合设备的调度问题，目的在于求解ALD重入过程的最优调度。建立了系统的Petri网模型，利用该模型，可以通过比较非常有限的若干调度的生产节拍而得到其重入过程的最优调度。基于所建立的Petri网模型，开发出了基于eM-Plant的仿真系统，可以有效地获得给定调度的生产节拍。给定系统的参数可以有效地求得重入过程的最优调度。文中应用例子来说明所提出的方法的应用。

关键词: 自动组合装置, 调度, 晶圆制造, 重入加工, 仿真

Abstract: For some wafer fabrication processes in cluster tools, wafer revisiting is required. Atomic layer deposition (ALD) is such a typical revisiting process. It is a challenging problem to schedule a cluster tool for such a process. A study is conducted to schedule single-arm cluster tools to find an optimal schedule of the revisiting process of ALD. To do so, a Petri net model is developed to describe the behavior of the system. With this model, an optimal schedule can be obtained from very limited number of candidate schedules by just comparing the cycle time of these schedules. Based on the Petri net model, a simulation system is developed by using eM-Plant platform such that the cycle time of a schedule for the revisiting process can be efficiently obtained. In this way, given the parameters of the system for the revisiting process, an optimal schedule can be efficiently found. Illustrative examples are given to show the application of the proposed method.

Key words: cluster tools, scheduling, wafer fabrication, revisiting process, simulation

孙玉玺，伍乃骐. 基于eM-Plant求解具有晶圆重入过程的单臂组合设备最优调度的仿真方法[J]. 工业工程, 2012, 15(5): 26-32.

Sun Yu-xi， Wu Nai-qi. eM-Plant-Based Simulation Method for Optimal Scheduling of Single-Arm Cluster Tools with Wafer Revisiting[J]. Industrial Engineering Journal , 2012, 15(5): 26-32.

参考文献

［1］Bader M, Hall R, Strasser G. Integrated processing equipment ［J］. Solid State Technology, 1990,33(5):149-154. ［2］Burggraaf P. Coping with the high cost of wafer fabs ［J］. Semiconductor International, 1995, 38(3):45-50. ［3］Perkinson T L, MacLarty P K, Gyurcsik R S, Cavin R K, III. Singlewafer cluster tool performance: an analysis of throughput ［J］. IEEE Trans. on Semiconductor Manufacturing, 1994,7(3): 369-373. ［4］Perkinson T L, Gyurcsik R S, MacLarty P K. Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitations sequences on throughput ［J］. IEEE Transactions on Semiconductor Manufacturing, 1996, 9(3): 384-400. ［5］Venkatesh S, Davenport R, Foxhoven P, Nulman. J A steady state throughput analysis of cluster tools: dual-blade versus single-blade robots ［J］. IEEE Transactions on Semiconductor Manufacturing, 1997,10(4): 418-424. ［6］Ding S, Yi J, Zhang M. Scheduling multi-cluster tools: an integrated event graph and network model approach ［J］. IEEE Trans. on Semiconductor Manufacturing, 2006,19(3):339-351. ［7］Zuberek W M. Timed Petri nets in modeling and analysis of cluster tools［J］. IEEE Transactions on Robotics and Automation, 2001,17(5):562-575. ［8］Shin Y H, Lee T E, Kim J H, Lee H Y. Modeling and implementing a real-time scheduler for dual-armed cluster tools ［J］. Computers In Industry, 2001, 45(1): 13-27. ［9］Kim J H, Lee T E, Lee H Y, Park D B. Scheduling analysis of timed-constrained dual-armed cluster tools ［J］. IEEE Transactions on Semiconductor Manufacturing,2003,16(3):521-534. ［10］Lee T E, Lee H Y, Shin Y H. Workload balancing and scheduling of a single-armed cluster tool［C］.Proceedings of the 5th APIEMS Conference［EB/OL］. 2004:1-15. ［11］Lopez M J, Wood S C. Systems of multiple cluster toolsconfiguration, reliability, and performance ［J］. IEEE Transactions on Semiconductor Manufacturing,2003,16(2):170-178. ［12］Lee H Y, Lee T E. Scheduling single-armed cluster tools with reentrant wafer flows［J］. IEEE Transactions on Semiconductor Manufacturing, 2006,19(2):226-240. ［13］Zuberek W M. Cluster tools with chamber revisiting-modeling and analysis using timed Petri nets ［J］. IEEE Transactions on Semiconductor Manufacturing,2004,17(3)333-344. ［14］Wu N Q, Chu F, Chu C B, Zhou M C. Petri net-based scheduling of single-arm cluster tools with reentrant atomic layer deposition processes ［J］. IEEE Transactions on Automation Science and Engineering, 2011,8(1):42-55 . ［15］Wu N Q, Chu F, Chu C B, Zhou M C. A novel approach to scheduling of single-arm cluster tools with wafer revisiting［C］. Proceedings of the 5th IEEE Conference on Automation Science and Engineering,India: Bangalore,2009:22-25, 567-572. ［16］潘春荣,伍乃骐.晶圆制造自动化组合设备的调度问题研究［J］.计算机集成制造系统, 2009, 15(3): 522-528.  Pan Chun-rong, Wu Nai-qi. Scheduling of cluster tools in wafer fabrication ［J］. Computer Integrated Manufacturing Systems, 2009, 15(3): 522-528. ［17］施於人,邓易元,蒋维.eM-Plant仿真技术教程［M］. 北京：科学出版社，2009.

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