Review of Operations and Control of Cluster Tools in Semiconductor Wafer Fabrication

Abstract

Abstract: As integrated and configurable equipment with single wafer processing, cluster tools are increasingly adopted by semiconductor manufacturers. It results in higher yield, shorter cycle time, better utilization of space, and lower fabrication cost. However, with various constraints, it is difficult to effectively operate a cluster tool. Thus, great research attention has been paid for modeling, analyzing, and scheduling of cluster tools. In this paper, research advancement and techniques in modeling, analyzing, and scheduling of cluster tools are reviewed. It analyzes the advantages and disadvantages of the existing techniques. Based on the analysis, future research directions are given.

Key words: semiconductor manufacturing, cluster tools, production scheduling, system modeling and analysis

Min Yan, Wu Naiqi. Review of Operations and Control of Cluster Tools in Semiconductor Wafer Fabrication[J]. Industrial Engineering Journal , 2012, 15(2): 1-15.

References

［1］Bader M, Hall R,Strasser G.Integrated processing equipment［J］.Solid State Technology,1990,33(5):149-154. ［2］Burggraaf P. Coping with the high cost of wafer fabs［J］.Semiconductor International,1995,18(38)：45-50. ［3］Newboe B.Cluster tools: a process solution［J］.Semiconductor International,1990，13（8）：82-88. ［4］McNab T K. Cluster tools, part 1: emerging processes［J］.Semiconductor International,1990,13(9):58-63. ［5］Singer P. The driving forces in cluster tool development［J］.Semiconductor International,1995,18(8):113-118. ［6］Brauner N. Identical part production in cyclic robotic cells: concepts, overview and open questions［J］.Discrete Applied Mathematics,2008,156(13):2480-2492. ［7］Crama Y, Kats V, van de Klundert J,et al. Cyclic scheduling in robotic flowshops［J］.Annals of Operations Research,2000,96(1-4):97-124. ［8］Crama Y,van de Klundert J. Cyclic scheduling of identical parts in a robotic cell［J］. Operations Research, 1997,45(6):952-965. ［9］Dawande M,Geismar N,Pinedo M,et al. Throughput optimization in dualgripper interval robotic cells［J］.IIE Transactions, 2010,42(1):1-15. ［10］〖ZK(#〗Dawande M, Geismar H N,Sethi S P,et al. Throughput optimization in robotic cells［M］. New York:Springer,2007. ［11］Dawande M, Sriskandarajah C,Sethi C S. On throughput maximization in constant traveltime robotic cells［J］. Manufacturing and Service Operations Management, 2002,4(4):296312. ［12］Geismar H N, Dawande M,Sriskandarajah C, Throughput optimization in constant traveltime dualgripper robotic cells with parallel machines［J］. Production and Operations Management,2006,15(2):311328. ［13］Geismar H N, Chan L M A, Dawande M,et al, Approximations to optimal kunit cycles for single and dualgripper robotic cells［J］.Production and Operations Management, 2008,17(5):551563. ［14］Lei L,Wang T J, Determining optimal cyclic hoist schedules in a singlehoist electroplating line［J］.IIE Transactions,1994,26(2):2533. ［15］Sethi S, Sidney J,Sriskandarajah C, Scheduling in dualgripper robotic cells for productivity gains［J］.IEEE Transactions on Robotics and Automation, 2001,17(3):324341. ［16］Sethi S,Sriskandarajah C, Sorger G,et al.Sequencing of parts and robot moves in a robotic cell［J］. International Journal of Flexible Manufacturing Systems,1992,4(3):331358. ［17］Su Q, Chen F, Optimal sequencing of doublegripper gantry robot moves in tightlycoupled serial production systems［J］.IEEE Transaction on Robotics and Automation, 1996,12(1):2230. ［18］Kim JH, Lee TE, Lee HY, et al.Scheduling analysis of timedconstrained dualarmed cluster tools［J］.IEEE Transactions on Semiconductor Manufacturing, 2003,16(3):521534. ［19］Che A D,Chu C B. Multicyclic hoist scheduling with constant processing times［J］. IEEE Transactions on Robotics and Automation,2002,18(1):6980. ［20］Che A,Chu C. Cyclic hoist scheduling in large reallife electroplating lines［J］.OR Spectrum,2007,29(3): 445470. ［21］Kats V,Levner E,Mayzin L. Multiplepart cyclic hoist scheduling using a sieve method［J］. IEEE Transactions on Robotics and Automation,1999,15(4):704713. ［22］Yoon H J,Lee D Y. Realtime scheduling of wafer fabrication with multiple product types［C］∥Proceedings of IEEE International Conference on Systems, Man, and Cybernetics,Tokyo,1999:835840. ［23］Lopez M J,Wood S C. Systems of multiple cluster tools: configuration and performance under perfect reliability［J］. IEEE Transactions on Semiconductor Manufacturing,1998,11(3):465474. ［24］Lopez M J, Wood S C. Systems of multiple cluster tools: configuration, reliability, and performance［J］.IEEE Transactions on Semiconductor Manufacturing,2003,16(2):170178. ［25］Ding S, Yi J,Zhang M T.Multicluster tools scheduling: an integrated event graph and network model approach［J］. IEEE Transactions on Semiconductor Manufacturing,2006,19(3):339351. ［26］Yi J,Ding S,Song D. Steadystate throughput and scheduling analysis of multicluster tools for semiconductor manufacturing: A decomposition approach［J］∥Proceedings of 2005 IEEE International Conference on Robotics and Automation［EB/OL］.2005:292298. ［27］Chan W K V,Yi J,Ding S.Optimal scheduling of multicluster tools with constant robot moving times, part I: twocluster analysis［J］. IEEE Transactions on Automation Science and Engineering, 2011a,8(1):516. ［28］Chan W K V, Ding S,Yi J,et al, Optimal scheduling of multicluster tools with constant robot moving times, part II: treelike topology configuration［J］.IEEE Transactions on Automation Science and Engineering, 2011b,8(1):1728. ［29］Lee TE,Park SH. An extended event graph with negative places and tokens for timed window constraints［J］. IEEE Transactions on Automation Science and Engineering,2005,2(4):319332. ［30］Lee TE。 A review of scheduling theory and methods for semiconductor manufacturing cluster tools∥Proceedings of 2008 Winter Simulation Conference［EB/OL］,2008:21272135. ［31］Lee TE,Lee HY, Lee SJ. Scheduling a wet station for wafer cleaning with multiple job flows and multiple waferhandling robots［J］. International Journal of Production Research, 2007,45(3):487507. ［32］Oh H L. Conflict resolving algorithm to improve productivity in singlewafer processing∥Proceedings of the International Conference on Modeling and Analysis of Semiconductor Manufacturing［EB/OL］.2000:5560. ［33］Kim JH,Lee TE. Schedulability analysis of timedconstrained cluster tools with bounded time variation by an extended Petri net［J］. IEEE Transactions on Automation Science and Engineering,2008,5(3):490503. ［34］Johri P K. Practical issues in scheduling and dispatching in semiconductor wafer fabrication［J］. Journal of Manufacturing Systems, 1993,12(6):474485. ［35］Toba H. Segmentbased approach for realtime reactive rescheduling for automatic manufacturing control［J］. IEEE Transactions on Semiconductor Manufacturing,2000，13(3):264272. ［36］Koehler E J,Seppanen M S. Evaluation of cluster tool throughput for thin film head production∥Proceedings of 1999 Winter Simulation Conference［EB/OL］.1999:714719. ［37］Perkinson T L. Gyurcsik R S, MacLarty P K. Singlewafer cluster tool performance: an analysis of the effects of redundant chambers and revisitations sequences on throughput［J］.IEEE Transactions on Semiconductor Manufacturing,1996,9(3):384400. ［38］Perkinson T L, MacLarty P K, Gyurcsik R S,et al.Singlewafer cluster tool performance: an analysis of throughput［J］.IEEE Transactions on Semiconductor Manufacturing, 1994,7(3):369373. ［39］Venkatesh S, Davenport R,Foxhoven P,et al. A steady state throughput analysis of cluster tools: dualblade versus singleblade robots［J］. IEEE Transactions on Semiconductor Manufacturing,1997,10(4):418424. ［40］Srinivasn R S. Modeling and performance analysis of cluster tools using Petri nets［J］. IEEE Transactions on Semiconductor Manufacturing, 1998,11(3):394403. ［41］Zuberek W M. Timed Petri nets in modeling and analysis of cluster tools［J］.IEEE Transactions on Robotics and Automation, 2001,17(5):562575. ［42］Zuberek W M. Cluster tools with chamber revisitingmodeling and analysis using timed Petri nets［J］. IEEE Transactions on Semiconductor Manufacturing, 2004,17(3):333344. ［43］Wu N Q,Zhou M C. Colored timed Petri nets for modeling and analysis of cluster tools［J］. Asian Journal of Control,2010a,12(3):253266. ［44］Wu N Q, Zhou M C. A closedform solution for schedulability and optimal scheduling of dualarm cluster tools with wafer residency time constraint based on steady schedule analysis［J］.IEEE Transactions on Automation Science and Engineering,2010b,7(2):303315. ［45］Wu N Q,Zhou M C. Analysis of wafer sojourn time in dualarm cluster tools with residency time constraint and activity time variation［J］.IEEE Transactions on Semiconductor Manufacturing,2010c,23(1):5364. ［46］Wu N Q,Zhou M C. Petri netbased scheduling of timeconstrained dualarm cluster tools with bounded activity time variation∥Proceedings of 6th IEEE Conference on Automation Science and Engineering［EB/OL］.2010d:2124. ［47］Wu N Q. Necessary and sufficient conditions for deadlockfree operation in flexible manufacturing systems using a colored Petri net model［J］. IEEE Trans. On Systems, Man, and Cybernetics, Part C, 1999,29(2):192204. ［48］Wu N Q,Zhou M C. Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems based on a Petri net model［J］. IEEE Transactions on Robotics and Automation,2001,17(5):658669. ［49］Wu N Q, Chu F,Chu C B,et al. Petri netbased scheduling of singlearm cluster tools with reentrant atomic layer deposition processes［J］. IEEE Transactions on Automation Science and Engineering, 2011,8(1):4255. ［50］Wu N Q,Chu F, Chu C B,et al.Petri netbased cycle time analysis of dualarm cluster tools with wafer revisiting and swapping strategy∥Proceedings of 2011 IEEE International Conference on Robotics and Automation［EB/OL］.2011:913. ［51］Drobouchevitch I, Sethi S P,Sriskandarajah C. Scheduling dualgripper robotic cells: 1unit cycles［J］.European Journal of Operational Research, 2006,171(2):598631. ［52］Lee TE, Lee HY,Shin YH. Workload balancing and scheduling of a singlearmed cluster tool∥Proceedings of the 5th APIEMS Conference［EB/OL］.2004:115. ［53］Paek JH,Lee TE.Optimal scheduling of dualarmed cluster tools without swap restriction∥Proceedings of 2008 IEEE International Conference on Automation Science and Engineering［EB/OL］.2008:16. ［54］Lee TE. Stable earliest starting schedules for periodic job shops: a linear system approach［J］. International Journal of Flexible Manufacturing Systems, 2000,12(1):5980. ［55］Shin YH,Lee TE, Kim JH,et al. Modeling and implementing a realtime scheduler for dualarmed cluster tools［J］.Computers in Industry, 2001,45(1):1327. ［56］Rostami S,Hamidzadeh B,Camporese D. An optimal periodic scheduler for dualarm robots in cluster tools with residency constraints［J］. IEEE Transactions on Robotics and Automation,2001,17(5):609618. ［57］Rostami S,Hamidzadeh B. Optimal scheduling techniques for cluster tools with processmodule and transportmodule residency constraints［J］. IEEE Transactions on Semiconductor Manufacturing,2002,15(3):341349. ［58］Rostami S,Hamidzadeh B. An optimal residencyaware scheduling technique for cluster tools with buffer module［J］. IEEE Transactions on Semiconductor Manufacturing,2004,17(1):6873. ［59］Wu N Q,Chu C B,Chu F,et al.A Petri net method for schedulability and scheduling problems in singlearm cluster tools with wafer residency time constraints［J］. IEEE Transactions on Semiconductor Manufacturing, 2008a,21(2):224237. ［60］Yoon H J,Lee D Y.Online scheduling of integrated singlewafer processing tools with temporal constraints［J］. IEEE Transactions on Semiconductor Manufacturing,2005,18(3):390398. ［61］Wu N Q, Zhou M C, Peng S S.et al, Petri net modeling and realtime control of dualarm cluster tools with residency time constraint and activity time variations∥Proceedings of the 4th IEEE Conference on Automation Science and Engineering［EB/OL］.USA:Washington DC,2008:2326. ［62］Lee HY,Lee TE. Scheduling singlearmed cluster tools with reentrant wafer flows［J］. IEEE Transactions on Semiconductor Manufacturing,2006,19(2):224240. ［63］Yoon H J,Lee D Y. Identification of potential deadlock set in semiconductor track systems∥Proceedings of 2001 IEEE International Conference on Robotics and Automation［EB/OL］.2001:18201825. 〖HJ1.97mm〗［64］Yoon H J,Lee D Y. Deadlockfree scheduling of photolithography equipment in semiconductor fabrication［J］. IEEE Transactions on Semiconductor Manufacturing,2004,17(1):4254. ［65］Wu N Q,Zhou M C.Deadlock modeling and control of semiconductor track systems using resourceoriented Petri nets［J］. International Journal of Production Research, 2007a,45(15):34393456. ［66］Wu N Q,Zhou M C. Realtime deadlockfree scheduling for semiconductor track systems based on colored timed Petri nets［J］.OR Spectrum,2007b,29(3):421443. ［67］Dummler M A.Using simulation and genetic algorithms to improve cluster tool performance∥Proceedings of the 1999 Winter Simulation Conference［EB/OL］.1999:875879. ［68］Jevtic D.Method and aparatus for managing scheduling a multiple cluster tool［P］. European Patent 1,132,792(A2)Dec.〖KG-*3〗,2001. ［69］Jevtic D,Venkatesh S. Method and aparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot［P］. U S. Patent 6,224,638,May,2001. ［70］Yi J,Ding S,Song D,et al. Steadystate throughput and scheduling analysis of multicluster tools: An decomposition approach［J］. IEEE Transactions Automation Science and Engineering,2008,5(2):321336.

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